Si-based sensor是什么意思 Si-based sensor怎么读
Si-based sensor的用法和样例
- The characteristics and requests of micromachining for silicon based sensors are introduced.The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
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