wafern.薄脆饼；圆片；[宗]圣饼；[电]薄片；晶片v.封缄；切成薄片wafer defects晶圆瑕疵wafer warping圆片翘曲wafer printing晶片光刻wafer scrubber硅片擦洗机wafer computer晶片级计算机Wafer Thinning圆片减薄wafer handling晶片传送wafer flatness薄片平面度wafer transfer晶片传送wafer material晶圆材料