Spray deposition is a kind of complicated process affected by many parameters. 喷射沉积过程是一个多参数共同影响的复杂过程。
Charge accumulation effect on the surface of the insulation film degrades the quality of the films in the process of IBAD. 离子束辅助镀膜沉积过程中，绝缘薄膜表面的电荷积累效应严重影响了薄膜质量。
