sputtervt.喷溅；语无伦次地说vi.喷溅；生气激动地说；发出劈啪声n.劈啪声；飞溅；兴奋地说话sputter ion mass spectrometer溅射离子质谱计sputtering hollow cathode discharge溅射型空心阴极放电Sputtering yield energy distributions溅射产额能量分布