sputtervt.喷溅；语无伦次地说vi.喷溅；生气激动地说；发出劈啪声n.劈啪声；飞溅；兴奋地说话sputter-ion pump离子溅射泵sputtering chamber溅射室sputtering factors溅射参数sputtering coating溅射镀膜sputtering etching溅射腐蚀sputtered electrode溅射电极Sputtering ion pump溅射离子泵sputtering sequence溅射顺序sputtered film disk溅射薄膜磁盘sputtering pressure溅射气压