sputtervt.喷溅；语无伦次地说vi.喷溅；生气激动地说；发出劈啪声n.劈啪声；飞溅；兴奋地说话sputtering technology溅射工艺sputtering-ion pump溅射离子泵sputtering gas pressure溅射气压Sputtering power density溅射功率密度sputter loss coefficient损失系数sputtered NiCrAlY coating溅射涂层Sputtered nanocrystalline溅射纳米晶sputtered dielectric film溅射介质薄膜sputtering control factors溅射参数sputtering target materials溅射靶材