In the preparing process of these devices, the micropatterning of ferroelectric thin films is very important. 在这些器件的制作过程中，铁电薄膜的微图形化是非常重要的一环。
A method of manufacturing a flash memory device that prevents generation of voids when forming an interlayer dielectric film. 一种制造闪速存储器件的方法，其防止在形成层间介电薄膜时产生空隙。
